Integrated fan-out package and method of fabricating the same

ABSTRACT

An integrated fan-out package including an integrated circuit, an insulating encapsulation, and a redistribution circuit structure is provided. The integrated circuit includes an active surface, a plurality of sidewalls connected to the active surface, and a plurality of pads distributed on the active surface. The insulating encapsulation encapsulates the active surface and the sidewalls of the integrated circuit. The insulating encapsulation includes a plurality of first contact openings and a plurality of through holes, and the pads are exposed by the first contact openings. The redistribution circuit structure includes a redistribution conductive layer, wherein the redistribution conductive layer is disposed on the insulating encapsulation and is distributed in the first contact openings and the through holes. The redistribution conductive layer is electrically connected to the pads through the first contact openings. A method of fabricating the integrated fan-out package is also provided.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a divisional application of U.S. application Ser.No. 15/147,909, filed on May 5, 2016, now allowed. The entirety of eachof the above-mentioned patent applications is hereby incorporated byreference herein and made a part of this specification.

BACKGROUND

The semiconductor industry has experienced rapid growth due tocontinuous improvements in the integration density of various electroniccomponents (i.e., transistors, diodes, resistors, capacitors, etc.). Forthe most part, this improvement in integration density has come fromrepeated reductions in minimum feature size, which allows more of thesmaller components to be integrated into a given area. These smallerelectronic components also require smaller packages that utilize lessarea than previous packages. Some smaller types of packages forsemiconductor components include quad flat packages (QFPs), pin gridarray (PGA) packages, ball grid array (BGA) packages, and so on.

Currently, integrated fan-out packages are becoming increasingly popularfor their compactness. In the integrated fan-out packages, the formationof the redistribution circuit structure plays an important role duringpackaging process.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIGS. 1 through 11 illustrate a process flow for fabricating anintegrated fan-out package in accordance with some embodiments.

FIGS. 12 through 22 illustrate another process flow for fabricating anintegrated fan-out package in accordance with some alternativeembodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement(s) or feature(s) as illustrated in the figures. The spatiallyrelative terms are intended to encompass different orientations of thedevice in use or operation in addition to the orientation depicted inthe figures. The apparatus may be otherwise oriented (rotated 90 degreesor at other orientations) and the spatially relative descriptors usedherein may likewise be interpreted accordingly.

Other features and processes may also be included. For example, testingstructures may be included to aid in the verification testing of the 3Dpackaging or 3DIC devices. The testing structures may include, forexample, test pads formed in a redistribution layer or on a substratethat allows the testing of the 3D packaging or 3DIC, the use of probesand/or probe cards, and the like. The verification testing may beperformed on intermediate structures as well as the final structure.Additionally, the structures and methods disclosed herein may be used inconjunction with testing methodologies that incorporate intermediateverification of known good dies to increase the yield and decreasecosts.

FIGS. 1 through 11 illustrate a process flow for fabricating anintegrated fan-out package in accordance with some embodiments.

Referring to FIG. 1, a carrier C having a de-bonding layer DB and adielectric layer DI formed thereon is provided, wherein the de-bondinglayer DB is formed between the carrier C and the dielectric layer DI. Insome embodiments, the carrier C is a glass substrate, the de-bondinglayer DB is a light-to-heat conversion (LTHC) release layer formed onthe glass substrate, and the dielectric layer DI is a photosensitivepolybenzoxazole (PBO) layer formed on the de-bonding layer DB, forexample. In alternative embodiments, the de-bonding layer DB may be aphoto-curable release film whose viscosity is decreased by photo-curingprocess or a thermal curable release film whose viscosity is decreasedby thermal-curing process, and the dielectric layer DI may be made fromother photosensitive or non-photosensitive dielectric materials.

After the carrier C having the de-bonding layer DB and the dielectriclayer DI formed thereon is provided, an integrated circuit 100 includingan active surface 100 a, a plurality of sidewalls 100 b, a plurality ofpads 102 distributed on the active surface 100 a, and a passivationlayer 104 is then mounted on the carrier C having the dielectric layerDI formed thereon. Specifically, the integrated circuit 100 is mountedon the dielectric layer DI. As shown in FIG. 1, the passivation layer104 covers the active surface 100 a of the integrated circuit 100, andthe pads 102 are partially exposed by the passivation layer 104. In someembodiments, the pads 102 are aluminum pads or other metal pads, and thepassivation layer 104 is a photosensitive polybenzoxazole (PBO) layer,for example.

In some embodiments, the integrated circuit 100 is adhered with thedielectric layer DI through a die-attach film (DAF) 110 or the like. Forexample, the material of the die-attach film 110 includes phenolic basematerials or epoxy base materials.

Referring to FIG. 2, an insulating material 120 is formed on thedielectric layer DI so as to cover the integrated circuit 100 and thedie-attach film 110. In some embodiments, the insulating material 120 isa molding compound formed by molding process. The pads 102 and thepassivation layer 104 of the integrated circuit 100 are entirely coveredby the insulating material 120. Furthermore, the sidewalls 100 b of theintegrated circuit 100 are encapsulated by the insulating material 120.The maximum thickness of the insulating material 120 is greater than thethickness of the integrated circuit 100 such that the sidewalls 100 b,the pads 102 and the passivation layer 104 of the integrated circuit 100are not revealed by the insulating material 120. In other words, the topsurface of the insulating material 120 is higher than the active surface100 a of the integrated circuit 100. The insulating material 120includes epoxy or other suitable resins, for example. In somealternative embodiments, the insulating material 120 may be formed byphoto pattern-able molding compounds, such as phenolic resin, epoxyresin, or combinations thereof. In some embodiments, the insulatingmaterial 120 may further include inorganic filler or inorganic compound(e.g. silica, clay, and so on) can be added therein so as to optimizecoefficient of thermal expansion (CTE) of the insulating material 120.

As shown in FIG. 2, the dimension (e.g., thickness and width) of theinsulating material 120 is greater than the dimension (e.g., thicknessand width) of the integrated circuit 100. The insulating material 120not only covers the dielectric layer DI, but also encapsulates theactive surface 100 a and the sidewalls 100 b of the integrated circuit100. In some embodiments, the insulating material 120 may have a planartop surface.

Referring to FIG. 3, after the insulating material 120 is formed, theinsulating material 120 is patterned to form an insulating encapsulation120′. The insulating encapsulation 120′ partially encapsulates theactive surface 100 a of the integrated circuit 100 and entirelyencapsulates the sidewalls 100 b of the integrated circuit 100. Theinsulating encapsulation 120′ includes a plurality of first contactopenings 122 for exposing the pads 102 and a plurality of through holes124 for exposing the dielectric layer DI. In some embodiments, theinsulating encapsulation 120′ may include a first encapsulation portion120A and a second encapsulation portion 120B connected to the firstencapsulation portion 120A, wherein the first encapsulation portion 120Acovers the active surface 100 a of the integrated circuit 100, and thesecond encapsulation portion 120B covers the sidewalls 100 b of theintegrated circuit 100 and extends outward from the first encapsulationportion 120A and the sidewalls 100 b of the integrated circuit 100.

As shown in FIG. 3, the thickness T_(A) of the first encapsulationportion 120A is smaller than the thickness T_(B) of the secondencapsulation portion 120B. The first contact openings 122 are formedand distributed in the first encapsulation portion 120A of theinsulating encapsulation 120′ while the through holes 124 are formed anddistributed in the second encapsulation portion 120B of insulatingencapsulation 120′.

As shown in FIG. 2 and FIG. 3, the first contact openings 122 and thethrough holes 124 distributed in the insulating encapsulation 120′ maybe simultaneously formed by photolithography when the insulatingmaterial 120 is formed by photo pattern-able molding compounds. However,the patterning of the insulating material 120 is not limited thereto. Insome alternative embodiments, since the first contact openings 122 andthe through holes 124 are different in dimension and require differentprocess requirements, the first contact openings 122 and the throughholes 124 may be formed by different processes respectively. Forexample, during the formation (e.g. molding process) of the insulatingmaterial 120, the through holes 124 are formed simultaneously, and thefirst contact openings 122 are then formed in the insulating material120 having the through holes 124. The insulating material 120 having thethrough holes 124 distributed therein are formed by molding process, andthe first contact openings 122 are formed by photolithography, forinstance.

The dimension (e.g., depth and width) of the first contact openings 122formed in the first encapsulation portion 120A is smaller than thedimension (e.g., depth and width) of through holes 124 formed in thesecond encapsulation portion 120A. In some embodiments, the arrangingpitch of the first contact openings 122 is smaller than that of thethrough holes 124.

Referring to FIG. 4 through FIG. 8, after the insulating encapsulation120′ is formed, a redistribution circuit structure RDL (shown in FIG. 8)electrically connected to the pads 102 of the integrated circuit 100 isformed on the insulating encapsulation 120′ and on portions of thedielectric layer DI exposed by the through holes 124. The redistributioncircuit structure RDL (shown in FIG. 8) is fabricated to electricallyconnect to the pads 102 of the integrated circuit 100. The fabricationprocess flow of the redistribution circuit structure RDL (shown in FIG.8) is described in accompany with FIG. 4 through FIG. 8 in detail.

Referring to FIG. 4, a seed layer 130 is conformally sputtered, forexample, on the insulating material 120, the pads 102 exposed by thefirst contact openings 122, and the portions of the dielectric layer 140exposed by the through holes 124. For example, the seed layer 130 is atitanium/copper composited layer, wherein the sputtered titanium thinfilm is in contact with the insulating material 120, the pads 102exposed by the first contact openings 122, and the portions of thedielectric layer 140 exposed by the through holes 124. In addition, thesputtered copper thin film is formed on the sputtered titanium thinfilm. After the seed layer 130 is deposited, a patterned photoresistlayer PR is formed on the seed layer 130. The patterned photoresistlayer PR includes openings corresponding to the first contact openings122 and the through holes 124, and portions of the seed layer 130 areexposed by the openings of the photoresist layer PR.

It is noted that, before the seed layer 130 is formed, no additionaldielectric material is required to be formed over the insulatingencapsulation 120′. The insulating encapsulation 120′ provides a planarsurface for fabrication of the sequentially formed redistributioncircuit structure RDL (shown in FIG. 8).

Referring to FIG. 5, a plating process is performed to form aredistribution conductive layer 140 on portions of the seed layer 130.The redistribution conductive layer 140 is plated on the portions of theseed layer 130 exposed by the openings of the patterned photoresistlayer PR. In some embodiments, the redistribution conductive layer 140includes a plurality of first conductive patterns 140A corresponding tothe first contact openings 122 and a plurality of second conductivepatterns 140B corresponding to the through holes 124. Since thedimension (e.g., depth and width) of the first contact openings 122 issmaller than the dimension (e.g., depth and width) of through holes 124,the gap filling capacity of the first conductive patterns 140A is moreobvious than that of the second conductive patterns 140B. Accordingly,the first contact openings 122 may be filled by the first conductivepatterns 140A, and the through holes 124 may not be filled by the secondconductive patterns 140B. As shown in FIG. 5, the second conductivepatterns 140B conformally cover the surface of the insulatingencapsulation 120′ in the proximity of the through holes 124 such thatthe through holes 124 are partially occupied by the second conductivepatterns 140B. In other words, the through holes 124 are not fullyoccupied by the second conductive patterns 140B. In some alternativeembodiments, the profile and the gap filling capacity of the secondconductive patterns 140B may be modified through proper adjustment ofthin-film deposition recipe.

Referring to FIG. 6, after the redistribution conductive layer 140 isformed, the patterned photoresist layer PR is stripped such that theportions of the seed layer 130 that are not covered by theredistribution conductive layer 140 are exposed.

As shown in FIG. 6, by using the redistribution conductive layer 140 asa hard mask, the portions of the seed layer 130 uncovered by theredistribution conductive layer 140 are removed so as to form apatterned seed layer 130′ under the redistribution conductive layer 140.The patterned seed layer 130′ includes a plurality of first seedpatterns 130A and a plurality of second seed patterns 130B. The firstseed patterns 130A are between the pads 102 and the first conductivepatterns 140A, and the second seed patterns 130B are between theinsulating encapsulation 120′ and the second conductive patterns 140B.In some embodiments, the seed layer 130 is patterned by etching untilthe insulating encapsulation 120′ is exposed. After the patterned seedlayer 130′ is formed under the redistribution conductive layer 140, thefirst conductive patterns 140A of the redistribution conductive layer140 are electrically connected to the pads 102 of the integrated circuit100 through the first seed patterns 130A in the first contact openings122.

As shown in FIG. 6, the first conductive patterns 140A and the secondconductive patterns 140B are not merely distributed within the firstcontact openings 122 and the through holes 124. The first conductivepatterns 140A further extend from the first contact openings 122 of theinsulating encapsulation 120′ so as to partially cover the first surfaceS1 of the insulating encapsulation 120′, and the second conductivepatterns 140B further extend from the through holes 124 of theinsulating encapsulation 120′ so as to partially cover the first surfaceS1 of the insulating encapsulation. The second conductive patterns 140Bof the redistribution conductive layer 140 penetrate the insulatingencapsulation 120′. In other words, the second conductive patterns 140Bare simultaneously exposed at the first surface S1 and the secondsurface S2 of the insulating encapsulation 120′.

It is noted that, for some signal transmission purpose, parts of thefirst conductive patterns 140A may be electrically connected to thesecond conductive patterns 140B (not shown in the cross-sectional viewillustrated in FIG. 6).

As shown in FIG. 6, the redistribution conductive layer 140 not onlyre-layouts the pads 102 of the integrated circuit 100, but also servesas conductive through vias in the insulating encapsulation 120′. In someembodiments, the first conductive patterns 140A of the redistributionconductive layer 140 re-layout the pads 102 of the integrated circuit100, and the second conductive patterns 140B of the redistributionconductive layer 140 serve as conductive through vias. In other words,the fabrication process of the conductive through vias distributed inthe insulating encapsulation 120′ is integrated into the fabricationprocess of the bottommost redistribution conductive layer 140 of theredistribution circuit structure.

Referring to FIG. 7, after the redistribution conductive layer 140 isformed on the insulating encapsulation 120′, an inter-dielectric layer150 is formed to cover the redistribution conductive layer 140 and theinsulating encapsulation 120′. The inter-dielectric layer 150 includes aplurality of protrusions 150P protruding into the through holes 124. Theprotrusions 150P of the inter-dielectric layer 150 are in contact withthe second conductive patterns 140B of the redistribution conductivelayer 140, as shown in FIG. 7. Furthermore, the inter-dielectric layer150 may include a plurality of contact openings 152 for exposing thefirst conductive patterns 140A and the second conductive patterns 140B.

Referring to FIG. 8, in some embodiments, after the redistributionconductive layer 140 and the inter-dielectric layer 150 are formed,steps illustrated in FIG. 4 through 7 may be repeated at least one timeso as to fabricate the redistribution circuit structure RDL over theintegrated circuit 100 and the insulating encapsulation 120′. Theredistribution circuit structure RDL includes a plurality ofinter-dielectric layers (150 and 170) and a plurality of redistributionconductive layers (140, 160 and 180) stacked alternately. In someembodiment, the topmost redistribution conductive layer 180 of theredistribution circuit structure RDL may include a plurality ofunder-ball metallurgy (UBM) patterns 182 for electrically connectingwith conductive balls and/or at least one connection pad 184 forelectrically connecting with at least one passive component.

After the redistribution circuit structure RDL is formed, a plurality ofconductive balls 190 are placed on the under-ball metallurgy patterns182, and a plurality of passive components 192 are mounted on theconnection pads 184. In some embodiments, the conductive balls 190 maybe placed on the under-ball metallurgy patterns 182 by ball placementprocess, and the passive components 192 may be mounted on the connectionpads 184 through reflow process. It is noted that passive components 192and the connection pad 184 for electrically connecting with at least onepassive component 192 are not necessary in some embodiments.

Referring to FIG. 8 and FIG. 9, after the conductive balls 190 and/orthe passive components 192 are formed, the dielectric layer DI isde-bonded from the de-bonding layer DB such the dielectric layer DI isseparated or delaminated from the de-bonding layer DB and the carrier C.In some embodiments, the de-bonding layer DB (e.g., the LTHC releaselayer) may be irradiated by an UV laser such that the dielectric layerDI is peeled from the carrier C.

As shown in FIG. 9, the dielectric layer DI is then patterned such thata plurality of second contact openings O are formed to expose the bottomsurfaces of the second conductive patterns 140B. The number of thecontact openings O formed in the dielectric layer DI is corresponding tothe number of the second conductive patterns 140B.

Referring to FIG. 10, after the contact openings O is formed in thedielectric layer DI, a plurality of terminals 194 (e.g., conductiveballs) are placed on the bottom surfaces of the second conductivepatterns 140B that are exposed by the contact openings O. And, theterminals 194 (e.g., conductive balls) are, for example, reflowed tobond with the exposed surfaces of the second conductive patterns 140B.In other words, the terminals 194 are electrically connected to thesecond conductive patterns 140B. As shown in FIG. 10, after theconductive balls 190 and the terminals 194 are formed, an integratedfan-out package of the integrated circuit 100 having dual-side terminalsis accomplished.

Referring to FIG. 11, another package 200 is then provided. In someembodiments, the package 200 is, for example, a memory device. Thepackage 200 is stacked over and is electrically connected to theintegrated fan-out package illustrated in FIG. 10 through the conductiveballs 194 such that a package-on-package (POP) structure is fabricated.

FIGS. 12 through 22 illustrate another process flow for fabricating anintegrated fan-out package in accordance with some alternativeembodiments.

Referring to FIG. 12, a carrier C having a de-bonding layer DB and asacrificial dielectric layer DI′ formed thereon is provided, wherein thede-bonding layer DB is formed between the carrier C and the sacrificialdielectric layer DI′. In some embodiments, the carrier C is a glasssubstrate, the de-bonding layer DB is a light-to-heat conversion (LTHC)release layer formed on the glass substrate, and the sacrificialdielectric layer DI′ is a silicon nitride layer, a silicon oxide layer,or the like formed on the de-bonding layer DB, for example. Inalternative embodiments, the de-bonding layer DB may be a photo-curablerelease film whose viscosity may be decreased by photo-curing process ora thermal curable release film whose viscosity may be decreased bythermal-curing process, and the dielectric layer DI may be made fromother photosensitive or non-photosensitive dielectric materials. In thepresent embodiment, the sacrificial dielectric layer DI′ is formed anddesigned to be removed sequentially (as shown in FIG. 21).

After the carrier C having the de-bonding layer DB and the sacrificialdielectric layer DI′ formed thereon is provided, an integrated circuit100 including an active surface 100 a, a plurality of sidewalls 100 b, aplurality of pads 102 distributed on the active surface 100 a, and apassivation layer 104 is mounted on the carrier C having the dielectriclayer DI formed thereon. Specifically, the integrated circuit 100 ismounted on the surface of the sacrificial dielectric layer DI′.

Referring to FIG. 13 through FIG. 19, the process flow illustrated inFIG. 13 through FIG. 19 is similar with the process flow illustrated inFIG. 2 through FIG. 8. The detailed descriptions regarding to FIG. 13through FIG. 19 are thus omitted.

Referring to FIG. 20, after the redistribution circuit structure RDL,the conductive balls 190 and the passive components 192 are formed, thesacrificial dielectric layer DI′ is de-bonded from the de-bonding layerDB such the sacrificial dielectric layer DI′ is separated or delaminatedfrom the carrier C. In some embodiments, the de-bonding layer DB (e.g.,the LTHC release layer) may be irradiated by an UV laser such that thesacrificial dielectric layer DI′ is peeled from the carrier C. As shownin FIG. 20, the sacrificial dielectric layer DI′ is then removed suchthat the second surface S2 of the insulating encapsulation 120′ and thebottom surfaces of the second conductive patterns 140B are exposed.

Referring to FIG. 21, after the sacrificial dielectric layer DI′ isremoved, a plurality of terminals 194 (e.g., conductive balls) areplaced on the bottom surfaces of the second conductive patterns 140B.And, the terminals 194 (e.g., conductive balls) are, for example,reflowed to bond with the bottom surfaces of the second conductivepatterns 140B. In other words, the terminals 194 are electricallyconnected to the second conductive patterns 140B. As shown in FIG. 21,after the conductive balls 190 and the terminals 194 are formed, anotherintegrated fan-out package of the integrated circuit 100 havingdual-side terminal is accomplished.

Referring to FIG. 22, another package 300 is then provided. In someembodiments, the package 300 is, for example, a memory device. Thepackage 300 is stacked over and is electrically connected to theintegrated fan-out package illustrated in FIG. 21 through the conductiveballs 194 such that a package-on-package (POP) structure is fabricated.

In the above-mentioned embodiments, since the fabrication process of theconductive through vias in the insulating encapsulation is integratedinto the fabrication process of the bottommost redistribution conductivelayer of the redistribution circuit structure, the fabrication costs ofthe integrated fan-out packages may be reduced and the fabricationprocess of the integrated fan-out packages is simple.

In accordance with some embodiments of the present disclosure, anintegrated fan-out package including an integrated circuit, aninsulating encapsulation, and a redistribution circuit structure isprovided. The integrated circuit includes an active surface, a pluralityof sidewalls connected to the active surface, and a plurality of padsdistributed on the active surface. The insulating encapsulationencapsulates the active surface and the sidewalls of the integratedcircuit. The insulating encapsulation includes a plurality of firstcontact openings and a plurality of through holes, and the pads areexposed by the first contact openings. The redistribution circuitstructure includes a redistribution conductive layer, wherein theredistribution conductive layer is disposed on the insulatingencapsulation and is distributed in the first contact openings and thethrough holes. The redistribution conductive layer is electricallyconnected to the pads through the first contact openings.

In accordance with alternative embodiments of the present disclosure, amethod of fabricating an integrated fan-out package is provided. Themethod includes the following steps. An integrated circuit is mounted ona carrier, wherein the integrated circuit includes an active surface, aplurality of sidewalls connected to the active surface, and a pluralityof pads distributed on the active surface. An insulating encapsulationis formed on the carrier, wherein the insulating encapsulation coversthe carrier and encapsulates the active surface and the sidewalls of theintegrated circuit. The insulating encapsulation includes a plurality offirst contact openings and a plurality of through holes, and the padsare exposed by the first contact openings. A redistribution circuitstructure is formed on the insulating encapsulation. The redistributioncircuit structure includes a redistribution conductive layer, whereinthe redistribution conductive layer is disposed on the insulatingencapsulation and is distributed in the first contact openings and thethrough holes. The redistribution conductive layer is electricallyconnected to the pads through the first contact openings. The carrier isremoved to expose portions of the redistribution conductive layerdistributed in the through holes.

In accordance with yet alternative embodiments of the presentdisclosure, another method of fabricating an integrated fan-out packageis provided. The method includes the following steps. A carrier having ade-bonding layer and a dielectric layer disposed thereon is provided,wherein the de-bonding layer being between the carrier and thedielectric layer. An integrated circuit is mounted on the dielectriclayer, wherein the integrated circuit includes an active surface, aplurality of sidewalls connected to the active surface, and a pluralityof pads distributed on the active surface. An insulating encapsulationis formed on the dielectric layer, wherein the insulating encapsulationcovers the dielectric layer and encapsulates the active surface and thesidewalls of the integrated circuit. The insulating encapsulationincludes a plurality of first contact openings for exposing the pads anda plurality of through holes for exposing the dielectric layer. Aredistribution circuit structure is formed on the insulatingencapsulation, wherein the redistribution circuit structure includes aredistribution conductive layer. The redistribution conductive layer isdisposed on the insulating encapsulation and is distributed in the firstcontact openings and the through holes. The redistribution conductivelayer is electrically connected to the pads through the first contactopenings. The carrier is de-bonded from the dielectric layer.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. An integrated fan-out package, comprising: anintegrated circuit die comprising an active surface, a plurality ofsidewalls connected to the active surface, and a plurality of padsdistributed on the active surface; an insulating encapsulationencapsulating the active surface and the sidewalls of the integratedcircuit die, the insulating encapsulation comprising a plurality offirst contact openings and a plurality of through holes; and aredistribution circuit structure comprising a first redistributionconductive layer on the insulating encapsulation, a firstinter-dielectric layer covering the first redistribution conductivelayer, a second redistribution conductive layer on the firstinter-dielectric layer, and a second inter-dielectric layer covering thesecond redistribution conductive layer, wherein the firstinter-dielectric layer comprises a plurality of contact openings thatare offset from the through holes, and the second redistributionconductive layer is electrically connected to the first redistributionconductive layer through the contact openings, wherein the firstredistribution conductive layer comprises a plurality of firstconductive patterns electrically connected to the pads through the firstcontact openings and a plurality of second conductive patterns locatedin the through holes.
 2. The integrated fan-out package of claim 1,wherein the insulating encapsulation comprises a first encapsulationportion and a second encapsulation portion, the first encapsulationportion covers the active surface of the integrated circuit die, thesecond encapsulation portion covers the sidewalls of the integratedcircuit die and extends outward from the first encapsulation portion,and a thickness of the first encapsulation portion is smaller than athickness of the second encapsulation portion.
 3. The integrated fan-outpackage of claim 2, wherein the first contact openings are distributedin the first encapsulation portion and the through holes are distributedin the second encapsulation portion.
 4. The integrated fan-out packageof claim 1, wherein a material of the insulating encapsulation comprisesa photo patternable molding compound.
 5. The integrated fan-out packageof claim 1, wherein the insulating encapsulation comprises a firstsurface and a second surface opposite to the first surface, the firstconductive patterns extend from the first contact openings of theinsulating encapsulation to partially cover the first surface of theinsulating encapsulation, and the second conductive patterns extend fromthe through holes of the insulating encapsulation to partially cover thefirst surface of the insulating encapsulation.
 6. The integrated fan-outpackage of claim 1, wherein the second conductive patterns conformallycover and partially occupy the through holes of the insulatingencapsulation.
 7. The integrated fan-out package of claim 1, wherein atleast one of the first conductive pattern is electrically connected toone of the second conductive patterns.
 8. The integrated fan-out packageof claim 1, wherein the first redistribution circuit structure furthercomprises a patterned seed layer, the patterned seed layer comprises aplurality of first seed patterns and a plurality of second seedpatterns, the first seed patterns are between the pads and the firstconductive patterns, and the second seed patterns are between theinsulating encapsulation and the second conductive patterns.
 9. Anintegrated fan-out package, comprising: an integrated circuit diecomprising an active surface, a plurality of sidewalls connected to theactive surface, and a plurality of pads distributed on the activesurface; an insulating encapsulation encapsulating the active surfaceand the sidewalls of the integrated circuit die, the insulatingencapsulation comprising a plurality of first contact openings and aplurality of through holes; and a redistribution circuit structurecomprising a first redistribution conductive layer on the insulatingencapsulation, a first inter-dielectric layer covering the firstredistribution conductive layer, at least one second redistributionconductive layer on the first inter-dielectric layer, and at least onesecond inter-dielectric layer covering the at least one secondredistribution conductive layer, the first inter-dielectric layercomprising a plurality of protrusions extending into the through holes,wherein the first inter-dielectric layer comprises a plurality ofcontact openings that are offset from the protrusions, and the at leastone second redistribution conductive layer is electrically connected tothe first redistribution conductive layer through the contact openings,wherein the first redistribution conductive layer comprises a pluralityof first conductive patterns electrically connected to the pads throughthe first contact openings and a plurality of second conductive patternslocated in the through holes, the second conductive patterns partiallyoccupying the through holes of the insulating encapsulation andlaterally encapsulating the protrusions.
 10. The integrated fan-outpackage of claim 9, wherein the insulating encapsulation comprises afirst encapsulation portion and a second encapsulation portion, thefirst encapsulation portion covers the active surface of the integratedcircuit die, the second encapsulation portion covers the sidewalls ofthe integrated circuit die and extends outward from the firstencapsulation portion, and a thickness of the first encapsulationportion is smaller than a thickness of the second encapsulation portion.11. The integrated fan-out package of claim 10, wherein the firstcontact openings are distributed in the first encapsulation portion andthe through holes are distributed in the second encapsulation portion.12. The integrated fan-out package of claim 9, wherein a material of theinsulating encapsulation comprises a photo patternable molding compound.13. The integrated fan-out package of claim 9, wherein the insulatingencapsulation comprises a first surface and a second surface opposite tothe first surface, the first conductive patterns extend from the firstcontact openings of the insulating encapsulation to partially cover thefirst surface of the insulating encapsulation, and the second conductivepatterns extend from the through holes of the insulating encapsulationto partially cover the first surface of the insulating encapsulation.14. The integrated fan-out package of claim 9, wherein at least one ofthe first conductive patterns is electrically connected to one of thesecond conductive patterns.
 15. The integrated fan-out package of claim9, wherein the first redistribution circuit structure further comprisesa patterned seed layer, the patterned seed layer comprises a pluralityof first seed patterns and a plurality of second seed patterns, thefirst seed patterns are between the pads and the first conductivepatterns, and the second seed patterns are between the insulatingencapsulation and the second conductive patterns.
 16. An integratedfan-out package, comprising: an integrated circuit die comprising anactive surface, a plurality of sidewalls connected to the activesurface, and a plurality of pads distributed on the active surface; aninsulating encapsulation encapsulating the active surface and thesidewalls of the integrated circuit die, the insulating encapsulationcomprising a plurality of first contact openings and a plurality ofthrough holes; and a redistribution circuit structure comprising a firstredistribution conductive layer on the insulating encapsulation, a firstinter-dielectric layer covering the first redistribution conductivelayer, at least one second redistribution conductive layer on the firstinter-dielectric layer, and at least one second inter-dielectric layercovering the at least one second redistribution conductive layer, thefirst inter-dielectric layer comprising a plurality of protrusionsextending into the through holes, and the first inter-dielectric layercomprises a plurality of contact openings that are offset from theprotrusions, wherein the at least one second redistribution conductivelayer is electrically connected to the first redistribution conductivelayer through the contact openings, wherein the first redistributionconductive layer comprises a plurality of first conductive patternselectrically connected to the pads through the first contact openingsand a plurality of second conductive patterns located in the throughholes, the second conductive patterns conformally covering the throughholes of the insulating encapsulation and laterally encapsulating theprotrusions.
 17. The integrated fan-out package of claim 16, wherein amaterial of the insulating encapsulation comprises a photo patternablemolding compound.
 18. The integrated fan-out package of claim 16,wherein at least one of the first conductive patterns is electricallyconnected to one of the second conductive patterns.
 19. The integratedfan-out package of claim 16, wherein the insulating encapsulationcomprises a first encapsulation portion and a second encapsulationportion, the first encapsulation portion covers the active surface ofthe integrated circuit die, the second encapsulation portion covers thesidewalls of the integrated circuit die and extends outward from thefirst encapsulation portion, and a thickness of the first encapsulationportion is smaller than a thickness of the second encapsulation portion.20. The integrated fan-out package of claim 19, wherein the firstcontact openings are distributed in the first encapsulation portion andthe through holes are distributed in the second encapsulation portion.